Optical system scheme of the novel Tilted Wave Fizeau Interferometer. (IMAGE)
Caption
The beam of a laser is expanded by a telescope (expander) to illuminate a point source array (PSA). The PSA contains diffractive microlenses on its front side that focus the incoming light onto a pinhole array on the backside. Thus it converts the incoming plane wave into a grid of spherical wavefronts. These are collimated at the collimation lens (CL). The subsequent Fizeau objective, often referred to as transmission sphere, has a spherical last surface (Fizeau surface), which reflects a part of the incoming wavefront. This reflected wavefront serves as reference beam. The other part of the propagating light is reflected back from the sample (SUT) thus carrying the desired shape information of the SUT. The reflected light from the SUT and the reference beam propagate via the beamsplitter (BS) and the camera objective (CO) to the chip of the camera where their interference pattern is recorded.
Credit
by Christian Schober, Rolf Beisswanger, Antonia Gronle, Christof Pruss, Wolfgang Osten
Usage Restrictions
Credit must be given to the creator.
License
CC BY