Figure 2 | Experimental results using IL-GPSE (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Figure 2 | Experimental results using IL-GPSE

Caption

a, Cross-sectional profiles of nanogratings fabricated via different combinations of IL and secondary exposure doses. b, The sub-micron spatial resolution in the feature size modulation achieved using single-pixel secondary exposure.

Credit

by Zhuofei Gan, Hongtao Feng, Liyang Chen, Siyi Min, Chuwei Liang, Menghong Xu, Zijie Jiang, Zhao Sun, Chuying Sun, Dehu Cui, and Wen-Di Li.

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CC BY

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