Figure 3. Performance Comparison (IMAGE)

Tokyo Institute of Technology

Figure 3. Performance Comparison

Caption

The graph shows a comparison of Brownian noise (BN) versus capacitance sensitivity. Thanks to the high density of gold, the BN achieved in this work was more than an order of magnitude lower than those of conventional devices when compared with the same sensitivity. Furthermore, our device was fabricated by surface micromachining that would useful for miniaturization.

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Sensors and Materials

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