Figure 1. Schematic Image of the Proposed MEMS Structure (IMAGE)

Tokyo Institute of Technology

Figure 1. Schematic Image of the Proposed MEMS Structure

Caption

The illustration shows a schematic image of the proposed single-axis MEMS capacitive accelerometer. Input acceleration can be sensed by monitoring the capacitance change between the proof mass and the fixed electrode. The device is realized by the multiple layers made of electroplated gold. We utilize the third (M3) and fourth (M4) layers for the spring structure, and the M4 and fifth (M5) layers for the proof mass structure.

Credit

Sensors and Materials, Daisuke Yamane

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