Cross Sections of Stress-Free Films (IMAGE)

Tokyo Metropolitan University

Cross Sections of Stress-Free Films

Caption

(a)-(d) show cross-sections of films made using different sputtering gases and pulsed bias voltages, imaged using scanning electron microscopy. Note how the columns (or "grains") get thicker from (a)-(c); similarly thick columns are seen in (d).

Credit

Tokyo Metropolitan University

Usage Restrictions

None

License

Licensed content

Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.