晶圆级硅锥阵列的制备 (IMAGE)

Science China Press

晶圆级硅锥阵列的制备

Caption

a）硅锥阵列制备过程示意图；（b）ICP刻蚀过程中硅锥阵列衍变的SEM图像；（c-e）不同曲率半径的锥型RRAM器件的SEM图像；（f）均匀硅锥阵列的3D图像。

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©《中国科学》杂志社

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