Electron Microscope Images of Silicon Nanostructures (IMAGE)

DOE/Brookhaven National Laboratory

Electron Microscope Images of Silicon Nanostructures

Caption

Left: A scanning electron microscope (SEM) image of silicon elbow-shaped nanopatterns with different feature sizes (linewidths). Right: A high-magnification SEM image of high-resolution, high-aspect-ratio silicon nanostructures patterned at a pitch resolution (linewidth plus spacewidth, or space between lines) of 500 nm.

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Brookhaven National Laboratory

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