FIG 2 How FIB Works (IMAGE)

University of Oxford

FIG 2 How FIB Works

Caption

How FIB works: A tiny, focused beam of gallium ions is used to locally bombard a substrate material. In the process some of the substrate atoms are removed, leaving behind a trench in the substrate material. This method allows precise cutting of materials at the nano-scale. Unfortunately the technique is not perfect and results in defects, as well as some gallium implanted into the substrate material.

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Oxford University

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