[Figure2] (IMAGE) National Research Council of Science & Technology Caption Ion implantation device used in SiC power semiconductor process Credit Korea Electrotechnology Research Institute Usage Restrictions The sources of photos and research results from KERI must be specified. License Original content Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.