Inspecting EUV-patterned silicon wafer (IMAGE)

DOE/Lawrence Berkeley National Laboratory

Inspecting EUV-patterned silicon wafer

Caption

Patterning circuits at the atomic scale: Berkeley Lab CHiPPS researchers Beihang Yu and Areza Sumitro use scanning electron microscopes at the Molecular Foundry to inspect EUV-patterned photoresists on silicon wafers. The work is critical to accelerating the commercialization of new EUV patterning materials for the production of advanced microchips.

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Marilyn Sargent/Berkeley Lab

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