electron microscope sample loading (IMAGE)

DOE/Lawrence Berkeley National Laboratory

electron microscope sample loading

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Berkeley Lab CHiPPS researcher Beihang Yu loading a sample EUV-patterned silicon wafer for inspection via scanning electron microscope at the Molecular Foundry. The work is critical to accelerating the commercialization of new EUV patterning materials for advanced microchips.

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Marilyn Sargent/Berkeley Lab

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