FIG 2 (IMAGE)
Caption
Characterizations of flexible humidity sensors. SEM images of GWLM (a-d) with and (a, e) without laser sintering. (f) EDX images of the Ga, In, and O distributions. (g) Histogram of diameter size distribution for the unsintered GWLM particles on the PI film. (h) Resistivity of the laser induced conductive GWLM paths at different laser fluences. (i) The minimum resolution of sintered LM path at a laser fluence of 9.4 J/cm2. (j)-(l) Schematics of Ga2O3/LM-based humidity sensors with various fabrication parameters (i.e. widths and lengths of electrodes, UV laser fluence) (top). Cycle measurements of Ga2O3/LM-based humidity sensors by periodically varying the humidity from 30% RH to 95% RH (bottom).
Credit
OEA
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CC BY