Experimental demonstration of mechanical BIC in an optomechanical microresonator. (IMAGE)
Caption
a, Scanning electron microscope image of a fabricated silicon optomechanical microresonator. The nearby bus waveguide is used for coupling light into the resonator for optical measurement of its mechanical modes. b, Measured mechanical Q factors as a function of rₓ under the ambient pressure of 6.0 × 10⁻³ Pa. c, Measured mechanical Q factor of the BIC as a function of the ambient pressure.
Credit
by Yue Yu, Xiang Xi, and Xiankai Sun
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License
CC BY