Chang-Yong Nam (IMAGE) DOE/Brookhaven National Laboratory Caption Chang-Yong Nam of the Center for Functional Nanomaterials is the technical lead and inventor of a vapor-based process technology for next-generation semiconductor manufacturing by extreme-ultraviolet lithography—an emerging technique to make computer chips on smaller scales than ever before. Credit Brookhaven National Laboratory Usage Restrictions n/a License Original content Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.