Layer-by-layer epitaxy of high-quality multilayer MoS2 4-inch wafers (IMAGE)

Science China Press

Layer-by-layer epitaxy of high-quality multilayer MoS2 4-inch wafers

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(a) Schematic illustration of epitaxy process. (b) Photographs of 4-inch MoS2 wafers: monolayer (i), bilayer (ii), trilayer (iii). (c) Cross-sectional HAADF-STEM images of epitaxial mono-, bi- and trilayer MoS2. Scale bars: 3 nm. (d,e) Color-coded images of typical Raman line scan mapping along the horizontal (d) and longitudinal direction (e) of monolayer (left panel), bilayer (middle panel) and trilayer MoS2 (right panel).

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