LHSI optics methodology (IMAGE)
Caption
LHSI optics methodology. (a) Schematic illustration of LHSI optics methodology. A wafer is scanned by a broadband line beam with dimensions of 13×1 mm2, and the reflected signal is dispersed and detected by a 2D area camera. (b) The raw image detected by the camera. The broadband line beam is dispersed along the wavelength axis. For clear and accurate spectral imaging, a compensation process should be applied. (c) HSI module, which consists of two SDMs. The reflected signal is cropped by a slit to enhance the imaging performance and increase the spectral resolution. Two SDMs and a detector are used applied to cover the 350 to 1100 nm broadband without spectral error. (d) 3D data cube generated by the LHSI system. Specifically, it is generated by stacking the line beam image for each scan position.
Credit
Yoon et al, doi 10.1117/1.JMM.21.2.021209.
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