XRC, TEM and Raman analyses for crystal quality of as-grown AlN film. (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

XRC, TEM and Raman analyses for crystal quality of as-grown AlN film.

Caption

a FWHMs XRCs of AlN epilayer with various thicknesses grown on Gr-buffered sapphire. b Estimated DD of the AlN films with and without Gr buffer layer with various thicknesses. c DF images of epitaxial AlN/Gr/sapphire with g = [0002]. d HRTEM image of the AlN/Gr/sapphire interface. e Raman spectra of as-grown AlN/Gr/sapphire structure. f Relative Raman shifts of E₂ (high) of AlN with various growth thicknesses.

Credit

by Hongliang Chang, Zhetong Liu, Shenyuan Yang, Yaqi Gao, Jingyuan Shan, Bingyao Liu, Jingyu Sun, Zhaolong Chen, Jianchang Yan, Zhiqiang Liu, Junxi Wang, Peng Gao, Jinmin Li, Zhongfan Liu, Tongbo Wei

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