Conventional Device (IMAGE)
Caption
The example of conventional atmospheric pressure abatement device. In the conventional abatement device, the pump outlet of the device manufacturing device is diluted with huge amount of nitrogen gas to ensure safety of the piping to the abatement device, and it is detoxified by high temperature heat treatment under atmospheric pressure. As a reactor, combustion type, heater type and plasma type are generally used. The cost of Nitrogen gas and energy of heating up the Nitrogen are wasted.
Credit
Kanken Techno Co.,Ltd.
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