The device-fabrication process of the integrated self-assembling electronic signal filter. (IMAGE)

University of Illinois at Urbana-Champaign, News Bureau

The device-fabrication process of the integrated self-assembling electronic signal filter.

Caption

The device-fabrication process includes the deposition of metals by electron-beam evaporation and lithography to define the metal pattern and etching process. The final etching step then triggers the self-rolling process of the stacked membrane.

Credit

Graphic courtesy Xiuling Li.

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