GaN Si wafer Cross-Section (IMAGE)

University of Illinois Grainger College of Engineering

GaN Si wafer Cross-Section

Caption

a) Cross sectional structure. b) TEM image of top 80 nm of the HEMT structure. The dark gray layer marks the start of the surface. c) STEM image of top 80 nm. The surface starts beneath the black layer and the dark band in the image is the AlN spacer. d) EDS Chemical Analysis of top 25 nm. Data before 4 nm are the background values from above the surface.

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University of Illinois

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