(a) Top view micrograph of the high energy-efficiency capacitive sensors integrated on a silicon substrate; (b) Photos of domestic CMOS wafers of the sensors; (c) Top view micrograph of capacitive humidity sensor; (d) Demonstration system of circuit board and humidity test. (IMAGE)

Peking University

(a) Top view micrograph of the high energy-efficiency capacitive sensors integrated on a silicon substrate; (b) Photos of domestic CMOS wafers of the sensors; (c) Top view micrograph of capacitive humidity sensor; (d) Demonstration system of circuit board and humidity test.

Caption

(a) Top view micrograph of the high energy-efficiency capacitive sensors integrated on a silicon substrate; (b) Photos of domestic CMOS wafers of the sensors; (c) Top view micrograph of capacitive humidity sensor; (d) Demonstration system of circuit board and humidity test.

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School of Integrated Circuits, Peking University.

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