MEMs Chip (IMAGE)

DOE/Argonne National Laboratory

MEMs Chip

Caption

This image gives a close-up view of a metasurface-based flat lens (square piece) integrated onto a MEMS scanner. Integration of MEMS devices with metalenses will help manipulate light in sensors by combining the strengths of high-speed dynamic control and precise spatial manipulation of wave fronts.This image was taken with an optical microscope at Argonne's Center for Nanoscale Materials.

Credit

Argonne National Laboratory

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