MEMs Chip With Measurement (IMAGE)

DOE/Argonne National Laboratory

MEMs Chip With Measurement

Caption

In this image, a circular metasurface-based flat lens has been integrated onto a MEMS scanner. Integration of MEMS devices with metalenses combine the strength of high-speed dynamic control with precise spatial manipulation of wave-fronts. This image was taken with a scanning electron micrograph at Argonne's Center for Nanoscale Materials.

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Argonne National Laboratory

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