Microcapacitor (IMAGE)

DOE/Lawrence Berkeley National Laboratory

Microcapacitor

Caption

Microcapacitors made with engineered hafnium oxide/zirconium oxide films in 3D trench capacitor structures -- the same structures used in modern microelectronics -- achieve record-high energy storage and power density, paving the way for on-chip energy storage.

Credit

Nirmaan Shanker/Suraj Cheema

Usage Restrictions

N/A

License

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