GHz bursts in MHz burst (BiBurst) enabling high-speed femtosecond laser ablation of Silicon due to prevention of air ionization (IMAGE)
Caption
Higher laser intensities are preferred to increase ablation speed, while it suffers from detrimental effects on ablation quality due to excess heat generation and air ionization. BiBurst mode of femtosecond laser, which is a combination of GHz bursts in MHz bursts, successfully prevents air breakdown at BiBurst pulse energy higher than the pulse energy inducing the air ionization by the conventional irradiation scheme (single-pulse mode). The BiBurst mode enables us to enhance the ablation speed by a factor of 23 without deteriorating the ablation quality compared to the single-pulse mode ablation under the conditions where the air ionization is avoided.
Credit
By Kotaro Obata, Francesc Caballero-Lucas, Shota Kawabata, Godai Miyaji and Koji Sugioka.
Usage Restrictions
Credit must be given to the creator. Only noncommercial uses of the work are permitted.
License
CC BY-NC