GHz burst mode enabling high-performance microfabrication with low thermal effect, smooth surface and high ablation efficiency. (IMAGE)

International Journal of Extreme Manufacturing

GHz burst mode enabling high-performance microfabrication with low thermal effect, smooth surface and high ablation efficiency.

Caption

GHz bursts of femtosecond laser pulses grouped in MHz envelopes bursts of femtosecond laser pulses, termed BiBurst mode, offers high- performance for ablation of silicon with higher efficiency and better quality as compared with the conventional single-pulse mode ablation. This achievement will accelerate the adoption of femtosecond lasers for commercial applications including drilling, cutting, and patterning of silicon.

Credit

By Francesc Caballero-Lucas, Kotaro Obata, Koji Sugioka.

Usage Restrictions

Credit must be given to the creator.

License

CC BY

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