Helium ion microscope system and its extreme applications (IMAGE)

International Journal of Extreme Manufacturing

Helium ion microscope system and its extreme applications

Caption

It provides a helium ion microscope system with GFIS that can be used for extreme nanostructures fabrications with high resolution and sensitivity.

Credit

By Shixuan He, Rong Tian, Wei Wu, Wen-Di Li, Deqiang Wang

Usage Restrictions

Credit must be given to the creator.

License

CC BY

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