EUVL tool (VIDEO) DOE/Lawrence Berkeley National Laboratory This video is under embargo. Please login to access this video. Caption A Berkeley Lab researcher loads a photoresist-coated wafer into the EUV lithography tool at the Center for X-Ray Optics. Credit Marilyn Sargent/Berkeley Lab Usage Restrictions None License Original content Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.