Micro-force sensor structural characterization and static performance (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Micro-force sensor structural characterization and static performance

Caption

a Optical microscopy images of clamped-beam probe with different heights and their corresponding reflection spectra. b, c, and d are the bending deformation simulation results of the sensor under the same micro force (1 μN) acting on the probe with different diameters (10, 5, and 3 μm). e Relationship between the probe diameter and flexure deformation under the same micro force (1 μN)

Credit

by Mengqiang Zou, Changrui Liao, Shen Liu, Cong Xiong, Cong Zhao, Jinlai Zhao, Zongsong Gan, Yanping Chen, Kaiming Yang, Dan Liu, Ying Wang and Yiping Wang

Usage Restrictions

Credit must be given to the creator.

License

CC BY

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