Diamond MEMS Chip (IMAGE) National Institute for Materials Science, Japan Caption Micrographs of the diamond MEMS chip developed through this research and one of the diamond cantilevers integrated into the chip Credit NIMS Usage Restrictions None License Licensed content Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.