Procedures of Nano-Scale Sculpture Technique (IMAGE)

National Institutes of Natural Sciences

Procedures of Nano-Scale Sculpture Technique

Caption

Fabrication procedures of "the nano-scale sculpture technique" by using a focused ion beam - electron beam (FIB-SEM) device. The upper series shows the schematic view of the fabrication by Ga ion beam. The images of (1) and (4) in the bottom series are the electron microscope (SEM) image corresponding to image (1) and image (4) in the upper series. The region shown by the yellow rectangle in image (4) is suitable for TEM observation.

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NIFS

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