Developing the Next Generation of Microsensors (IMAGE)

California Institute of Technology

Developing the Next Generation of Microsensors

Caption

Scanning electron microscope image of an array of optomechanical accelerometer devices formed in the surface of a silicon microchip. Highlighted green areas represent proof masses which are suspended by nanoscale tethers across the open etched areas of the chip. Even smaller, and barely visible, are pink highlighted optical cavities which sensitively read out the motion of the proof masses.

Credit

Martin Winger

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