Schematic of an Oxide Film/Substrate System and the Oxidation Process (IMAGE)

American Institute of Physics

Schematic of an Oxide Film/Substrate System and the Oxidation Process

Caption

Schematic of an oxide film/substrate system and the oxidation process. In the first stage, the flux affects the diffusion and adsorption of oxygen from gas to the gas/oxide interface.

Credit

Mengkun Yue

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