Experimental principle. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

Experimental principle.

Caption

Experimental principle. a Schematic diagram of the readout circuit for the accelerometer. b Experimental setup of the readout circuit board with simply packaged MEMS die. c Schematic diagram of the experiment setup. d Experiment setup.

Credit

Microsystems & Nanoengineering

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License

CC BY

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