State-of-the-art and 3-axis pyramid device. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

State-of-the-art and 3-axis pyramid device.

Caption

State-of-the-art and 3-axis pyramid device. a Our novel pyramid Hall device. b A standard 3-axis Hall sensor, composed of one planar Hall device and two vertical Hall devices. c The flat 8-contact Hall device, proposed by Schott9. d Sander’s hexagonal prism Hall device11. e An IMC Hall device12. f SEM image of the pyramid device, with a tilting angle of 30°. g SEM image of the pyramid device, with no tilting angle. h Optical microscope image of the sensor. The pyramid size and the contact dimensions are highlighted in the picture.

Credit

Microsystems & Nanoengineering

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CC BY

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