2D line gratings (IMAGE)
Caption
Researchers showed that their optimized direct laser writing approach could create high-resolution line gratings on a glass substrate. These SEM images show line gratings the researchers created using DLW with peripheral photoinhibition and a donut-shaped inhibition beam. (a, b) Line gratings with a sub-140 nm resolution printed with a writing speed of 100 μm/s. (c, d) Line gratings with a sub-150 nm resolution printed at a writing speed of 1000 μm/s.
Credit
Qiulan Liu, Zhejiang Lab and Zhejiang University in China
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