Schematic of the fundamental theorem and MPP-based micro/nanomanufacturing system. (IMAGE)
Caption
(a, b) Schematic of the fundamental theorem and MPP-based micro/nanomanufacturing system. (a-i) Single-photon and (a-ii) multiphoton absorption process. S0: the ground state; S1: the excited singlet state; T1 and Tn: the triplet states; IC: the internal conversion; MPI: multiphoton ionization; ESA: the excited state absorption; ISC: intersystem crossing. (b-i) MPP-based micro/nanomanufacturing devices and (b-ii) polymerization of photoresist at the center of the focal spot. LED: light-emitting diode; CMOS: complementary metal-oxide-semiconductor transistor; d: the transverse dimensions of the voxels formed by the multiphoton polymerization process; λ: the wavelength of the femtosecond laser source used in the multiphoton polymerization device. (c) Principles of photoinitiated free-radical polymerization.
Credit
Jiarui Hu et al.
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