fig 1 (IMAGE)

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fig 1

Caption

Fig. 1. Multi-focus laser processing for efficient fabrication of a trapezoid groove. (a) Schematic of multi-focus laser processing. (b) Simulated light intensity field of multi-focus spot. (c) 45° tilted view of multi-focus ablation. (d) 45° tilted view of multi-focus ablation after chemical etching. (e) Cross-sectional view of the groove on fused silica after laser processing, observed with an optical microscope. (f) Three-dimensional view of the groove after chemical etching, captured by laser scanning confocal microscopy. (g) 45° tilted view of the groove, imaged with scanning electronic microscope. Scale bars: 100 μm.

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