The design and fabrication of the proposed MEMS accelerometer. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

The design and fabrication of the proposed MEMS accelerometer.

Caption

The design and fabrication of the proposed MEMS accelerometer. a Schematic diagram of the accelerometer with two-layered proof mass. The upper layer has flexures, stiffness tuning electrodes, and stopper structure; the lower layer has displacement sensing and FTR electrodes. the proof mass is attached to the glass substrate through flexures and anchors. b Front-side SEM image of the fabricated accelerometer. c SEM image of the back-side of the fabricated proof mass. d Fabricating process of the accelerometer. (1) silicon cleaning, (2) 1st silicon patterning, (3) 2nd silicon patterning, (4) 3rd silicon patterning, (5) glass cleaning, (6) metal patterning, (7) anodic bonding, (8) silicon thinning, (9) structure releasing

Credit

Microsystems & Nanoengineering

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