Schematic diagram of the exfoliation mechanism of AlGaN fabricated on periodically formed AlN nanopillars via saturated vapor pressure water (IMAGE)

Meijo University

Schematic diagram of the exfoliation mechanism of AlGaN fabricated on periodically formed AlN nanopillars via saturated vapor pressure water

Caption

Exfoliation of AlGaN fabricated on AlN nanopillars occurs due to the chemical reaction and etching of the a- and ­m- crystallographic planes under heated and pressurized water.

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Motoaki Iwaya / Meijo University

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